Physics, 21.02.2020 21:39, AnastaziaOpfer3822

What are the bending spring constants for a silicon cantilever with E = 170 GPa, h = 5 µm, w = 2 µm, and L = 100 µm? In real manufacturing, there is likely a dimensional deviation in fabricated device from design values. How much the spring constant change if all dimensions are increased by 5%? How much the spring constant change if all dimensions are decreased by 5%? How much the spring constant change if all dimensions are increased by 200 nm?

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What are the bending spring constants for a silicon cantilever with E = 170 GPa, h = 5 µm, w = 2 µm,...