Physics
Physics, 11.10.2019 03:00, tajajohn7597

Consider a photoresist line whose cross-sectional profile has a trapezoidal shape with a sidewall angle θ (near 90º) with respect to the wafer surface. if the resist has vertical and horizontal etch rates rv and rh, respectively, derive an expression for the rate at which the critical dimension (horizontal width) of the resist feature decreases with etch time.

answer
Answers: 3

Other questions on the subject: Physics

image
Physics, 21.06.2019 15:00, gabbym39077
What is the frequency of a light wave with a wavelength of 620nm
Answers: 2
image
Physics, 21.06.2019 22:30, djs1671
Laboratory experiments, observational field studies, and model-building are all examples of different forms of scientific investigations.  in what way do laboratory experiments primarily differ from other forms of scientific investigations?   a.  a laboratory experiment is the only accepted form of investigation within the scientific community.  b.  studies about how things behave in nature or studies involving very large objects are best answered through laboratory experiments.  c.  laboratory experiments involve the identification and control of variables.  d.  data can only be generated through laboratory experiments, not other forms of investigation.
Answers: 3
image
Physics, 22.06.2019 00:30, klocke2001
Which of the following elements is in the same period as phosphorus? a. carbon c. nitrogen b. magnesium d. oxygen select the best answer from the choices provided a b c d
Answers: 1
image
Physics, 22.06.2019 05:30, ygrant03
Debbie places two shopping carts in a cart corral she pushes the first cart which then pushes a second cart what force is being exerted
Answers: 1
Do you know the correct answer?
Consider a photoresist line whose cross-sectional profile has a trapezoidal shape with a sidewall an...

Questions in other subjects: