Engineering, 26.02.2020 02:02, bigblow

Consider a micro mirror which is tethered by two torsional springs. Mirror and tethers are made of aluminum. Two tethers are fixed at the end. The length of tether (L) is 5 µm, thickness (t) is 0.3 µm, and width (w) is 1 µm. Assume that aluminum’s Young’s modulus is 70 GPa and Poisson’s ratio is 0.33. The micro mirror tilts into/out of the page with angle of ± 12°. What is the required torque to make the mirror tilted ± 12°?

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Consider a micro mirror which is tethered by two torsional springs. Mirror and tethers are made of a...